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Fabrication of Suspended PMMA-Graphene Membrane for High Sensitivity LC-MEMS Pressure Sensor

The LC-MEMS pressure sensor is an attractive option for an implantable sensor. It senses pressure wirelessly through an LC resonator, eliminating the requirement for electrical wiring or a battery system. However, the sensitivity of LC-MEMS pressure sensors is still comparatively low, especially in...

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Detalles Bibliográficos
Autores principales:	Yusof, Norliana, Bais, Badariah, Yunas, Jumril, Soin, Norhayati, Majlis, Burhanuddin Yeop
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8708556/ https://www.ncbi.nlm.nih.gov/pubmed/34940497 http://dx.doi.org/10.3390/membranes11120996

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