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Effects of NH(3) Plasma and Mg Doping on InGaZnO pH Sensing Membrane
In this study, the effects of magnesium (Mg) doping and Ammonia (NH(3)) plasma on the pH sensing capabilities of InGaZnO membranes were investigated. Undoped InGaZnO and Mg-doped pH sensing membranes with NH(3) plasma were examined with multiple material analyses including X-ray diffraction, X-ray p...
Autores principales: | Kao, Chyuan-Haur, Liu, Chia-Shao, Chan, Shih-Ming, Kuo, Chih-Chen, Tsai, Shang-Che, Lee, Ming-Ling, Chen, Hsiang |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2021
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8715674/ https://www.ncbi.nlm.nih.gov/pubmed/34940496 http://dx.doi.org/10.3390/membranes11120994 |
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