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Nondegenerate Polycrystalline Hydrogen-Doped Indium Oxide (InO(x):H) Thin Films Formed by Low-Temperature Solid-Phase Crystallization for Thin Film Transistors

We successfully demonstrated a transition from a metallic InO(x) film into a nondegenerate semiconductor InO(x):H film. A hydrogen-doped amorphous InO(x):H (a-InO(x):H) film, which was deposited by sputtering in Ar, O(2), and H(2) gases, could be converted into a polycrystalline InO(x):H (poly-InO(x...

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Detalles Bibliográficos
Autores principales:	Kataoka, Taiki, Magari, Yusaku, Makino, Hisao, Furuta, Mamoru
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8745918/ https://www.ncbi.nlm.nih.gov/pubmed/35009333 http://dx.doi.org/10.3390/ma15010187

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