Enhanced Conductivity and Microstructure in Highly Textured TiN(1–x)/c-Al(2)O(3) Thin Films

[Image: see text] Titanium nitride thin films are used as an electrode material in superconducting (SC) applications and in oxide electronics. By controlling the defect density in the TiN thin film, the electrical properties of the film can achieve low resistivities and a high critical temperature (...

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Detalles Bibliográficos
Autores principales: Zintler, Alexander, Eilhardt, Robert, Petzold, Stefan, Sharath, Sankaramangalam Ulhas, Bruder, Enrico, Kaiser, Nico, Alff, Lambert, Molina-Luna, Leopoldo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8772302/
https://www.ncbi.nlm.nih.gov/pubmed/35071892
http://dx.doi.org/10.1021/acsomega.1c05505

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8772302/
https://www.ncbi.nlm.nih.gov/pubmed/35071892
http://dx.doi.org/10.1021/acsomega.1c05505

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