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Enhanced Conductivity and Microstructure in Highly Textured TiN(1–x)/c-Al(2)O(3) Thin Films
[Image: see text] Titanium nitride thin films are used as an electrode material in superconducting (SC) applications and in oxide electronics. By controlling the defect density in the TiN thin film, the electrical properties of the film can achieve low resistivities and a high critical temperature (...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8772302/ https://www.ncbi.nlm.nih.gov/pubmed/35071892 http://dx.doi.org/10.1021/acsomega.1c05505 |