High-Sensitivity PtSe(2) Surface Plasmon Resonance Biosensor Based on Metal-Si-Metal Waveguide Structure

PtSe(2) as a novel TMDCs material is used to modify the traditional SPR biosensors to improve the performance. On this basis, this research proposes a metal-Si-metal waveguide structure to further improve the performance of the biosensor. In this study, we not only studied the effects of waveguide structures containing different metals on the performance of biosensor, but also discussed the performance change of the biosensor with the change of PtSe(2) thickness. After the final optimization, a BK7-Au-Si-Au-PtSe(2) (2 nm) biosensor structure achieved the highest sensitivity of 193.8°/RIU. This work provides a new development idea for the study of SPR biosensors with waveguide structures in the future.