A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone

Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric parameters through simulation analysis of the diamet...

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Detalles Bibliográficos
Autores principales: Zhong, Anxiang, Chen, Mingwei, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778131/
https://www.ncbi.nlm.nih.gov/pubmed/35056308
http://dx.doi.org/10.3390/mi13010143

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778131/
https://www.ncbi.nlm.nih.gov/pubmed/35056308
http://dx.doi.org/10.3390/mi13010143

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