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A MEMS-Based Co-Oscillating Electrochemical Vector Hydrophone

Aiming at the development needs of low-frequency and high-sensitivity vector hydrophones, this paper has developed a micro-electro-mechanical system (MEMS) based co-oscillating electrochemical vector hydrophone. We obtained the optimized geometric parameters through simulation analysis of the diamet...

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Detalles Bibliográficos
Autores principales:	Zhong, Anxiang, Chen, Mingwei, Lu, Yulan, Chen, Jian, Chen, Deyong, Wang, Junbo
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778131/ https://www.ncbi.nlm.nih.gov/pubmed/35056308 http://dx.doi.org/10.3390/mi13010143

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