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Structural Design and Optimization of a Resonant Micro-Accelerometer Based on Electrostatic Stiffness by an Improved Differential Evolution Algorithm

This study designed an in-plane resonant micro-accelerometer based on electrostatic stiffness. The accelerometer adopts a one-piece proof mass structure; two double-folded beam resonators are symmetrically distributed inside the proof mass, and only one displacement is introduced under the action of...

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Detalles Bibliográficos
Autores principales:	Huang, Libin, Li, Qike, Qin, Yan, Ding, Xukai, Zhang, Meimei, Zhao, Liye
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778195/ https://www.ncbi.nlm.nih.gov/pubmed/35056202 http://dx.doi.org/10.3390/mi13010038

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