A Novel MEMS Capacitive Microphone with Semiconstrained Diaphragm Supported with Center and Peripheral Backplate Protrusions

Audio applications such as mobile phones, hearing aids, true wireless stereo earphones, and Internet of Things devices demand small size, high performance, and reduced cost. Microelectromechanical system (MEMS) capacitive microphones fulfill these requirements with improved reliability and specifica...

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Detalles Bibliográficos
Autores principales: Shubham, Shubham, Seo, Yoonho, Naderyan, Vahid, Song, Xin, Frank, Anthony J., Johnson, Jeremy Thomas Morley Greenham, da Silva, Mark, Pedersen, Michael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778370/
https://www.ncbi.nlm.nih.gov/pubmed/35056187
http://dx.doi.org/10.3390/mi13010022

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8778370/
https://www.ncbi.nlm.nih.gov/pubmed/35056187
http://dx.doi.org/10.3390/mi13010022

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