Air Damping Analysis of a Micro-Coriolis Mass Flow Sensor

A micro-Coriolis mass flow sensor is a resonating device that measures small mass flows of fluid. A large vibration amplitude is desired as the Coriolis forces due to mass flow and, accordingly, the signal-to-noise ratio, are directly proportional to the vibration amplitude. Therefore, it is important to maximize the quality factor Q so that a large vibration amplitude can be achieved without requiring high actuation voltages and high power consumption. This paper presents an investigation of the Q factor of different devices in different resonant modes. Q factors were measured both at atmospheric pressure and in vacuum. The measurement results are compared with theoretical predictions. In the atmospheric environment, the Q factor increases when the resonance frequency increases. When reducing the pressure from 1 bar to [Formula: see text] bar, the Q factor almost doubles. At even lower pressures, the Q factor is inversely proportional to the pressure until intrinsic effects start to dominate, resulting in a maximum Q factor of approximately 7200.