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Comparison of Magnesium and Titanium Doping on Material Properties and pH Sensing Performance on Sb(2)O(3) Membranes in Electrolyte-Insulator-Semiconductor Structure

In this research, electrolyte-insulator-semiconductor (EIS) capacitors with Sb(2)O(3) sensing membranes were fabricated. The results indicate that Mg doping and Ti-doped Sb(2)O(3) membranes with appropriate annealing had improved material quality and sensing performance. Multiple material characteri...

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Detalles Bibliográficos
Autores principales:	Kao, Chyuan-Haur, Chen, Kuan-Lin, Chen, Jun-Ru, Chen, Shih-Ming, Kuo, Yaw-Wen, Lee, Ming-Ling, Lee, Lukas Jyuhn-Hsiarn, Chen, Hsiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8779276/ https://www.ncbi.nlm.nih.gov/pubmed/35054551 http://dx.doi.org/10.3390/membranes12010025

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