Fabrication of 2-D Capacitive Micromachined Ultrasonic Transducer (CMUT) Array through Silicon Wafer Bonding

Capacitive micromachined ultrasound transducers (CMUTs) have broad application prospects in medical imaging, flow monitoring, and nondestructive testing. CMUT arrays are limited by their fabrication process, which seriously restricts their further development and application. In this paper, a vacuum...

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Detalles Bibliográficos
Autores principales: Wang, Ziyuan, He, Changde, Zhang, Wendong, Li, Yifan, Gao, Pengfei, Meng, Yanan, Zhang, Guojun, Yang, Yuhua, Wang, Renxin, Cui, Jiangong, Wang, Hongliang, Zhang, Binzhen, Ren, Yongfeng, Zhen, Guoyong, Jiao, Xinquan, Zhang, Sai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8780229/
https://www.ncbi.nlm.nih.gov/pubmed/35056263
http://dx.doi.org/10.3390/mi13010099

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