Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB

Atomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The...

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Detalles Bibliográficos
Autores principales: Qiao, Yi, Zhao, Yalong, Zhang, Zheng, Liu, Binbin, Li, Fusheng, Tong, Huan, Wu, Jintong, Zhou, Zhanqi, Xu, Zongwei, Zhang, Yue
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2021
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8780746/
https://www.ncbi.nlm.nih.gov/pubmed/35056200
http://dx.doi.org/10.3390/mi13010035

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8780746/
https://www.ncbi.nlm.nih.gov/pubmed/35056200
http://dx.doi.org/10.3390/mi13010035

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