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Influence of Etching Trench on [Formula: see text] of Film Bulk Acoustic Resonator

As radio-frequency (RF) communication becomes more ubiquitous globally, film bulk acoustic resonators (FBAR) have attracted great attention for their superior performance. One of the key parameters of an FBAR, the effective electromechanical coupling coefficient ([Formula: see text]), has a great in...

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Detalles Bibliográficos
Autores principales:	Gao, Chao, Zou, Yang, Zhou, Jie, Liu, Yan, Liu, Wenjuan, Cai, Yao, Sun, Chengliang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8780816/ https://www.ncbi.nlm.nih.gov/pubmed/35056267 http://dx.doi.org/10.3390/mi13010102

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