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Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li(3)PO(4) Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge

Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li(3)PO(4) in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode potential provided in...

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Detalles Bibliográficos
Autores principales:	Gavrilov, Nikolay, Kamenetskikh, Alexander, Tretnikov, Petr, Nikonov, Alexey, Sinelnikov, Leonid, Butakov, Denis, Nikolkin, Viktor, Chukin, Andrey
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2021
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8781052/ https://www.ncbi.nlm.nih.gov/pubmed/35054566 http://dx.doi.org/10.3390/membranes12010040

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