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Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the sides of the resonant plate helps as a mechanical v...

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Detalles Bibliográficos
Autores principales:	Workie, Temesgen Bailie, Wu, Zhaohui, Tang, Panliang, Bao, Jingfu, Hashimoto, Ken-ya
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8781058/ https://www.ncbi.nlm.nih.gov/pubmed/35056270 http://dx.doi.org/10.3390/mi13010105

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