Design of a 3DOF XYZ Bi-Directional Motion Platform Based on Z-Shaped Flexure Hinges

This paper presents a design of a 3DOF XYZ bi-directional motion platform based on Z-shaped flexure hinges. In the presented platform, bridge-type mechanisms and Z-shaped flexure hinges are adopted to amplify its output displacement. Bi-direction motion along the X-axis and Y-axis follows the famous differential moving principle [Formula: see text] , and the bi-directional motion along the Z-axis is realized by using the reverse arrangement of the Z-shaped flexure hinges along the X-axis and Y-axis. Statics analysis of the proposed platform is carried out by the energy method, compliance matrix method, and force balance principle. Meanwhile, the Lagrange method is used to analyze the dynamics of the platform. A series of simulations are conducted to demonstrate the effectiveness of the proposed design. The simulation results show that the average displacements of the platform in the XYZ-axis are [Formula: see text] μm, [Formula: see text] μm and [Formula: see text] μm, respectively.