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Formation of Thermally Stable, High-Areal-Density, and Small-Diameter Catalyst Nanoparticles via Intermittent Sputtering Deposition for the High-Density Growth of Carbon Nanotubes

We report the formation of thermally stable catalyst nanoparticles via intermittent sputtering deposition to prevent the agglomeration of the nanoparticles during thermal chemical vapor deposition (CVD) and for the high-density growth of carbon nanotubes (CNTs). The preparation of high-areal-density...

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Detalles Bibliográficos
Autores principales:	Koji, Hirofumi, Kusumoto, Yuji, Hatta, Akimitsu, Furuta, Hiroshi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8838723/ https://www.ncbi.nlm.nih.gov/pubmed/35159710 http://dx.doi.org/10.3390/nano12030365

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