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Hysteresis Characteristics and MPI Compensation of Two-Dimensional Piezoelectric Positioning Stage

Piezoelectric positioning stage is the core component of precision positioning system and advanced instrument. Its hysteresis characteristics, especially rate-dependent characteristics, are the main factors affecting the positioning or control accuracy. The multi-slope Prandtl–Ishlinskii (MPI) based...

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Detalles Bibliográficos
Autores principales:	Wang, Wanqiang, Zhang, Jiaqi, Xu, Ming, Chen, Guojin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8874454/ https://www.ncbi.nlm.nih.gov/pubmed/35208445 http://dx.doi.org/10.3390/mi13020321

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