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MEMS-Casting Fabricated Chip-Style 3D Metal Solenoidal Transformers towards Integrated Power Supply
A silicon-chip-based 3D metal solenoidal transformer is proposed and developed to achieve AC-DC conversion for integrated power supply applications. With wafer-level micro electromechanical systems (MEMS) fabrication technique to form the metal casting mold and the following micro-casting technique...
Autores principales: | Wang, Nianying, Chen, Changnan, Chen, Pu, Gu, Jiebin, Pan, Pichao, Han, Ruofeng, Liu, Min, Li, Xinxin |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8874584/ https://www.ncbi.nlm.nih.gov/pubmed/35208449 http://dx.doi.org/10.3390/mi13020325 |
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