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Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser

Polydimethylsiloxane (PDMS) is hailed as one of the foundational materials that have been applied to different products in various fields because of its chemical resistance, low cost, excellent flexibility, and high molding capability. With the aim to achieve surface texture with high efficiency by...

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Autores principales: Zhang, Xifang, Yao, Zhenqiang, Hou, Zhibao, Song, Jiacheng
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8877450/
https://www.ncbi.nlm.nih.gov/pubmed/35208464
http://dx.doi.org/10.3390/mi13020340
_version_ 1784658423931994112
author Zhang, Xifang
Yao, Zhenqiang
Hou, Zhibao
Song, Jiacheng
author_facet Zhang, Xifang
Yao, Zhenqiang
Hou, Zhibao
Song, Jiacheng
author_sort Zhang, Xifang
collection PubMed
description Polydimethylsiloxane (PDMS) is hailed as one of the foundational materials that have been applied to different products in various fields because of its chemical resistance, low cost, excellent flexibility, and high molding capability. With the aim to achieve surface texture with high efficiency by means of electrochemical micromachining with PDMS mask, a femtosecond laser is utilized to process a precision array of micro-through-holes on PDMS films as the molds. The ablation process of PDMS with a femtosecond laser was investigated via numerical simulation verified with experiments indicating a laser energy density of 4.865 mJ/mm(2) as the ablation threshold of PDMS with the melting temperature of 930 K. The spiral scanning path with optimized radial offset was developed to ablate materials from the PDMS film to form the laminated profiles, and a tapered through hole was then formed with multilayer scanning. The profile dimension and accuracy were examined as control targets in terms of laser pulse energy and scanning speed, showing that a 12 μJ femtosecond laser pulse energy and 1000 mm/s scanning speed could bring about a nearly circular laminating profile with expected smaller exit diameter than the entry diameter. All the cross-section diameters of the microcone decreased with the increase of laser scanning speed, while the taper increased gradually and then saturated around a laser scanning speed of 800 mm/s due to the energy absorption resulting in smaller ablation in diameter and depth.
format Online
Article
Text
id pubmed-8877450
institution National Center for Biotechnology Information
language English
publishDate 2022
publisher MDPI
record_format MEDLINE/PubMed
spelling pubmed-88774502022-02-26 Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser Zhang, Xifang Yao, Zhenqiang Hou, Zhibao Song, Jiacheng Micromachines (Basel) Article Polydimethylsiloxane (PDMS) is hailed as one of the foundational materials that have been applied to different products in various fields because of its chemical resistance, low cost, excellent flexibility, and high molding capability. With the aim to achieve surface texture with high efficiency by means of electrochemical micromachining with PDMS mask, a femtosecond laser is utilized to process a precision array of micro-through-holes on PDMS films as the molds. The ablation process of PDMS with a femtosecond laser was investigated via numerical simulation verified with experiments indicating a laser energy density of 4.865 mJ/mm(2) as the ablation threshold of PDMS with the melting temperature of 930 K. The spiral scanning path with optimized radial offset was developed to ablate materials from the PDMS film to form the laminated profiles, and a tapered through hole was then formed with multilayer scanning. The profile dimension and accuracy were examined as control targets in terms of laser pulse energy and scanning speed, showing that a 12 μJ femtosecond laser pulse energy and 1000 mm/s scanning speed could bring about a nearly circular laminating profile with expected smaller exit diameter than the entry diameter. All the cross-section diameters of the microcone decreased with the increase of laser scanning speed, while the taper increased gradually and then saturated around a laser scanning speed of 800 mm/s due to the energy absorption resulting in smaller ablation in diameter and depth. MDPI 2022-02-21 /pmc/articles/PMC8877450/ /pubmed/35208464 http://dx.doi.org/10.3390/mi13020340 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhang, Xifang
Yao, Zhenqiang
Hou, Zhibao
Song, Jiacheng
Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser
title Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser
title_full Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser
title_fullStr Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser
title_full_unstemmed Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser
title_short Processing and Profile Control of Microhole Array for PDMS Mask with Femtosecond Laser
title_sort processing and profile control of microhole array for pdms mask with femtosecond laser
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8877450/
https://www.ncbi.nlm.nih.gov/pubmed/35208464
http://dx.doi.org/10.3390/mi13020340
work_keys_str_mv AT zhangxifang processingandprofilecontrolofmicroholearrayforpdmsmaskwithfemtosecondlaser
AT yaozhenqiang processingandprofilecontrolofmicroholearrayforpdmsmaskwithfemtosecondlaser
AT houzhibao processingandprofilecontrolofmicroholearrayforpdmsmaskwithfemtosecondlaser
AT songjiacheng processingandprofilecontrolofmicroholearrayforpdmsmaskwithfemtosecondlaser