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Application of Flow Field Analysis in Ion Beam Figuring for Ultra-Smooth Machining of Monocrystalline Silicon Mirror

X-ray free-electron lasers are large modern scientific devices that play an important role in fields such as frontier physics and biomedicine. In this study, a light source is connected to an experimental station through beam lines, which requires numerous ultra-smooth and high-precision X-ray mirro...

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Detalles Bibliográficos
Autores principales:	Wang, Zhe, Wu, Lingqi, Fang, Yuanyuan, Dun, Aihuan, Zhao, Jiaoling, Xu, Xueke, Zhu, Xiaolei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8877455/ https://www.ncbi.nlm.nih.gov/pubmed/35208442 http://dx.doi.org/10.3390/mi13020318

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