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Passive Photonic Integrated Circuits Elements Fabricated on a Silicon Nitride Platform

The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology—basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require...

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Detalles Bibliográficos
Autores principales:	Lelit, Marcin, Słowikowski, Mateusz, Filipiak, Maciej, Juchniewicz, Marcin, Stonio, Bartłomiej, Michalak, Bartosz, Pavłov, Krystian, Myśliwiec, Marcin, Wiśniewski, Piotr, Kaźmierczak, Andrzej, Anders, Krzysztof, Stopiński, Stanisław, Beck, Romuald B., Piramidowicz, Ryszard
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8877649/ https://www.ncbi.nlm.nih.gov/pubmed/35207939 http://dx.doi.org/10.3390/ma15041398

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