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The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates

In this paper, the influence of surface modification on the characteristics and properties of AlN thin films on Si and glass-ceramics substrates is investigated. The surface modification was made at various parameters of argon cluster ions. By using XRD and Raman spectroscopy, it was shown that the...

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Detalles Bibliográficos
Autores principales:	Nikolaev, Ivan V., Geydt, Pavel V., Korobeishchikov, Nikolay G., Kapishnikov, Aleksandr V., Volodin, Vladimir A., Azarov, Ivan A., Strunin, Vladimir I., Gerasimov, Evgeny Y.
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878031/ https://www.ncbi.nlm.nih.gov/pubmed/35214998 http://dx.doi.org/10.3390/nano12040670

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