A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch

In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an n-channel metal oxide semiconductor (NMOS) switch. To address the challenge...

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Detalles Bibliográficos
Autores principales: Li, Hongbo, Zhang, Chenchen, Xu, Gaobo, Ding, Xuefeng, Ni, Yue, Chen, Guidong, Chen, Dapeng, Zhou, Na, Mao, Haiyang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878302/
https://www.ncbi.nlm.nih.gov/pubmed/35208382
http://dx.doi.org/10.3390/mi13020258

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878302/
https://www.ncbi.nlm.nih.gov/pubmed/35208382
http://dx.doi.org/10.3390/mi13020258

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