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A Thermopile Infrared Sensor Array Pixel Monolithically Integrated with an NMOS Switch

In this article, we present the design, fabrication, and characterization of a thermopile infrared sensor array (TISA) pixel. This TISA pixel is composed of a dual-layer p+/n- poly-Si thermopile with a closed membrane and an n-channel metal oxide semiconductor (NMOS) switch. To address the challenge...

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Detalles Bibliográficos
Autores principales:	Li, Hongbo, Zhang, Chenchen, Xu, Gaobo, Ding, Xuefeng, Ni, Yue, Chen, Guidong, Chen, Dapeng, Zhou, Na, Mao, Haiyang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878302/ https://www.ncbi.nlm.nih.gov/pubmed/35208382 http://dx.doi.org/10.3390/mi13020258

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