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Scanning Probe Lithography: State-of-the-Art and Future Perspectives

High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning...

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Detalles Bibliográficos
Autores principales:	Fan, Pengfei, Gao, Jian, Mao, Hui, Geng, Yanquan, Yan, Yongda, Wang, Yuzhang, Goel, Saurav, Luo, Xichun
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Review
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8878409/ https://www.ncbi.nlm.nih.gov/pubmed/35208352 http://dx.doi.org/10.3390/mi13020228

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