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FEM Simulation of a High-Performance 128°Y–X LiNbO(3)/SiO(2)/Si Functional Substrate for Surface Acoustic Wave Gyroscopes

To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO(3)/SiO(2)/Si (LNOI) functional substrate were investigated with a three-dimensional finite element method. The influence of LNOI st...

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Detalles Bibliográficos
Autores principales:	Ma, Rui, Liu, Weiguo, Sun, Xueping, Zhou, Shun, Lin, Dabin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879009/ https://www.ncbi.nlm.nih.gov/pubmed/35208326 http://dx.doi.org/10.3390/mi13020202

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