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High-Performance Piezoelectric-Type MEMS Vibration Sensor Based on LiNbO(3) Single-Crystal Cantilever Beams

It is a great challenge to detect in-situ high-frequency vibration signals for extreme environment applications. A highly sensitive and robust vibration sensor is desired. Among the many piezoelectric materials, single-crystal lithium niobate (LiNbO(3)) could be a good candidate to meet the demand....

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Detalles Bibliográficos
Autores principales:	Wei, Huifen, Geng, Wenping, Bi, Kaixi, Li, Tao, Li, Xiangmeng, Qiao, Xiaojun, Shi, Yikun, Zhang, Huiyi, Zhao, Caiqin, Xue, Gang, Chou, Xiujian
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879162/ https://www.ncbi.nlm.nih.gov/pubmed/35208452 http://dx.doi.org/10.3390/mi13020329

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