Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation

Micro-electro-mechanical system (MEMS) vapor cells are key components for sensors such as chip-scale atomic clocks (CSACs) and magnetometers (CSAMs). Many approaches have been proposed to fabricate MEMS vapor cells. In this article, we propose a new method to fabricate wafer-level filling of MEMS va...

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Detalles Bibliográficos
Autores principales: Guo, Ping, Meng, Hongling, Dan, Lin, Zhao, Jianye
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879220/
https://www.ncbi.nlm.nih.gov/pubmed/35208340
http://dx.doi.org/10.3390/mi13020217

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879220/
https://www.ncbi.nlm.nih.gov/pubmed/35208340
http://dx.doi.org/10.3390/mi13020217

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