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Wafer-Level Filling of MEMS Vapor Cells Based on Chemical Reaction and Evaporation
Micro-electro-mechanical system (MEMS) vapor cells are key components for sensors such as chip-scale atomic clocks (CSACs) and magnetometers (CSAMs). Many approaches have been proposed to fabricate MEMS vapor cells. In this article, we propose a new method to fabricate wafer-level filling of MEMS va...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879220/ https://www.ncbi.nlm.nih.gov/pubmed/35208340 http://dx.doi.org/10.3390/mi13020217 |