Bidirectional Drive with Inhibited Hysteresis for Piezoelectric Actuators

Piezoelectric actuators with a flexible displacement amplification structure are widely used in the fields of precision driving and positioning. The displacement curve of conventional piezoelectric actuators is asymmetrical and non-linear, which leads to large non-linear errors and reduced positioning accuracy of these piezoelectric actuators. In this paper, a bidirectional active drive piezoelectric actuator is proposed, which suppresses the hysteresis phenomenon to a certain extent and reduces the non-linear error. Based on the deformation theory of the beam, a theoretical model of the rhombus mechanism was established, and the key parameters affecting the drive performance were analyzed. Then, the static and dynamic characteristics of series piezoelectric actuators were analyzed by the finite element method. A prototype was manufactured and the output performance was tested. The results show that the actuator can achieve a bidirectional symmetric output of amplification displacement, with a maximum value of 91.45 μm and a resolution of 35 nm. In addition, compared with the hysteresis loop of the piezoelectric stack, the nonlinear error is reduced by 62.94%.