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Fabrication, Performance, Characterization and Experimental Calibration of Embedded Thin-Film Sensor for Tool Cutting Force Measurement
Thin-film strain sensors are widely used because of their small volume, fast strain response and high measurement accuracy. Among them, the thin-film material and preparation process of thin-film strain sensors for force measurement are important aspects. In this paper, the preparation process param...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8879912/ https://www.ncbi.nlm.nih.gov/pubmed/35208434 http://dx.doi.org/10.3390/mi13020310 |