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A Thermoelectric MEMS Microwave Power Sensor with Inline Self-Detection Function
In this paper, the design, fabrication and measurement of a thermoelectric MEMS microwave power sensor with the terminal load inline self-detection function is proposed. The structure of the sensor mainly includes a coplanar waveguide, a thermopile, two terminal load resistors and two calibration re...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880168/ https://www.ncbi.nlm.nih.gov/pubmed/35208363 http://dx.doi.org/10.3390/mi13020239 |