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A Thermoelectric MEMS Microwave Power Sensor with Inline Self-Detection Function

In this paper, the design, fabrication and measurement of a thermoelectric MEMS microwave power sensor with the terminal load inline self-detection function is proposed. The structure of the sensor mainly includes a coplanar waveguide, a thermopile, two terminal load resistors and two calibration re...

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Detalles Bibliográficos
Autores principales:	Liu, Jiaqi, Hong, Yang, Wang, Jutao, Cai, Chunhua, Zhang, Zhiqiang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8880168/ https://www.ncbi.nlm.nih.gov/pubmed/35208363 http://dx.doi.org/10.3390/mi13020239

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