Polymer link breakage of polyimide-film-surface using hydrolysis reaction accelerator for enhancing chemical–mechanical-planarization polishing-rate

In this study, the chemical decomposition of a polyimide-film (i.e., a PI-film)-surface into a soft-film-surface containing negatively charged pyromellitic dianhydride (PMDA) and neutral 4,4′-oxydianiline (ODA) was successfully performed. The chemical decomposition was conducted by designing the slu...

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Detalles Bibliográficos
Autores principales: Jeong, Gi-Ppeum, Park, Jun-Seong, Lee, Seung-Jae, Kim, Pil-su, Han, Man-Hyup, Hong, Seong-Wan, Kim, Eun-Seong, Park, Jin-Hyung, Choo, Byoung-Kwon, Kang, Seung-Bae, Park, Jea-Gun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8888717/
https://www.ncbi.nlm.nih.gov/pubmed/35233019
http://dx.doi.org/10.1038/s41598-022-07340-y

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