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Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics

X-ray microscopes are powerful tools in the nano-inspection of materials owing to their ultra-high resolution at the molecular level. However, the focusing efficiency of binary zone plate lenses as key components in such probes is merely 5% in practice, hindering their application in advanced scient...

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Autores principales: Tong, Xujie, Chen, Yifang, Xu, Zijian, Li, Yijie, Xing, Zhenjiang, Mu, Chengyang, Zhao, Jun, Zhen, Xiangjun, Mao, Chengwen, Tai, Renzhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: International Union of Crystallography 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8900836/
https://www.ncbi.nlm.nih.gov/pubmed/35254301
http://dx.doi.org/10.1107/S1600577522000893
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author Tong, Xujie
Chen, Yifang
Xu, Zijian
Li, Yijie
Xing, Zhenjiang
Mu, Chengyang
Zhao, Jun
Zhen, Xiangjun
Mao, Chengwen
Tai, Renzhong
author_facet Tong, Xujie
Chen, Yifang
Xu, Zijian
Li, Yijie
Xing, Zhenjiang
Mu, Chengyang
Zhao, Jun
Zhen, Xiangjun
Mao, Chengwen
Tai, Renzhong
author_sort Tong, Xujie
collection PubMed
description X-ray microscopes are powerful tools in the nano-inspection of materials owing to their ultra-high resolution at the molecular level. However, the focusing efficiency of binary zone plate lenses as key components in such probes is merely 5% in practice, hindering their application in advanced scientific research. Although kinoform zone plate lenses are in principle supposed to possess high efficiency beyond binary ones, little progress has been reported so far due to the shortage of both a theoretical calculation approach and greyscale lithography for generating fine three-dimensional (3D) kinoform zones of the lenses. This paper reports our theoretical work for a modified beam propagation method to compute the focusing performance and state-of-the-art 3D greyscale electron beam lithography for kinoform zone plate lenses. Three different zone shapes – binary, kinoform and top-flat kinoform (nicknamed the trapezoid-kinoform) – were compared both theoretically and experimentally. Theoretical calculations suggest, for the first time, that the trapezoid-kinoform zone plate gives rise to the highest focusing efficiency among the three lenses, which was proved by optical characterization of the fabricated lens with hard X-rays. As high as 40% of the focusing efficiency by Au trapezoid-kinoform lenses with resolution of 250 nm at 8 keV has been achieved, which is two times higher than that of binary zone plate lenses. The origin of the enhanced efficiency in the trapezoid-kinoform zone plate lens was explained by the joint contributions from both the refraction through the kinoform slope and the diffraction through the top flat part of the trapezoid-kinoform zone plate. Such a breakthrough in focusing efficiency sheds light on the further development of X-ray lenses with both high resolution and high efficiency.
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spelling pubmed-89008362022-03-29 Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics Tong, Xujie Chen, Yifang Xu, Zijian Li, Yijie Xing, Zhenjiang Mu, Chengyang Zhao, Jun Zhen, Xiangjun Mao, Chengwen Tai, Renzhong J Synchrotron Radiat Research Papers X-ray microscopes are powerful tools in the nano-inspection of materials owing to their ultra-high resolution at the molecular level. However, the focusing efficiency of binary zone plate lenses as key components in such probes is merely 5% in practice, hindering their application in advanced scientific research. Although kinoform zone plate lenses are in principle supposed to possess high efficiency beyond binary ones, little progress has been reported so far due to the shortage of both a theoretical calculation approach and greyscale lithography for generating fine three-dimensional (3D) kinoform zones of the lenses. This paper reports our theoretical work for a modified beam propagation method to compute the focusing performance and state-of-the-art 3D greyscale electron beam lithography for kinoform zone plate lenses. Three different zone shapes – binary, kinoform and top-flat kinoform (nicknamed the trapezoid-kinoform) – were compared both theoretically and experimentally. Theoretical calculations suggest, for the first time, that the trapezoid-kinoform zone plate gives rise to the highest focusing efficiency among the three lenses, which was proved by optical characterization of the fabricated lens with hard X-rays. As high as 40% of the focusing efficiency by Au trapezoid-kinoform lenses with resolution of 250 nm at 8 keV has been achieved, which is two times higher than that of binary zone plate lenses. The origin of the enhanced efficiency in the trapezoid-kinoform zone plate lens was explained by the joint contributions from both the refraction through the kinoform slope and the diffraction through the top flat part of the trapezoid-kinoform zone plate. Such a breakthrough in focusing efficiency sheds light on the further development of X-ray lenses with both high resolution and high efficiency. International Union of Crystallography 2022-02-15 /pmc/articles/PMC8900836/ /pubmed/35254301 http://dx.doi.org/10.1107/S1600577522000893 Text en © Xujie Tong et al. 2022 https://creativecommons.org/licenses/by/4.0/This is an open-access article distributed under the terms of the Creative Commons Attribution (CC-BY) Licence, which permits unrestricted use, distribution, and reproduction in any medium, provided the original authors and source are cited.
spellingShingle Research Papers
Tong, Xujie
Chen, Yifang
Xu, Zijian
Li, Yijie
Xing, Zhenjiang
Mu, Chengyang
Zhao, Jun
Zhen, Xiangjun
Mao, Chengwen
Tai, Renzhong
Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics
title Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics
title_full Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics
title_fullStr Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics
title_full_unstemmed Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics
title_short Trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard X-ray optics
title_sort trapezoid-kinoform zone plate lens – a solution for efficient focusing in hard x-ray optics
topic Research Papers
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8900836/
https://www.ncbi.nlm.nih.gov/pubmed/35254301
http://dx.doi.org/10.1107/S1600577522000893
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