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Ultra-shallow dopant profiles as in-situ electrodes in scanning probe microscopy
The application of nano materials to control advanced functionality in semiconductor devices has reached the atomic scale. At this dimension the exact chemical and structural composition of a device is crucial for its performance. Rapid inspection techniques are required to find the optimal combinat...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8904578/ https://www.ncbi.nlm.nih.gov/pubmed/35260623 http://dx.doi.org/10.1038/s41598-022-07551-3 |