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Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations

Controlling laser-induced periodic surface structures on semiconductor materials is of significant importance for micro/nanophotonics. We here demonstrate a new approach to form the unusual structures on 4H-SiC crystal surface under irradiation of three collinear temporally delayed femtosecond laser...

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Autores principales: He, Wanlin, Zhao, Bo, Yang, Jianjun, Wen, Junqing, Wu, Hua, Guo, Shaoli, Bai, Lihua
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8912547/
https://www.ncbi.nlm.nih.gov/pubmed/35269288
http://dx.doi.org/10.3390/nano12050796
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author He, Wanlin
Zhao, Bo
Yang, Jianjun
Wen, Junqing
Wu, Hua
Guo, Shaoli
Bai, Lihua
author_facet He, Wanlin
Zhao, Bo
Yang, Jianjun
Wen, Junqing
Wu, Hua
Guo, Shaoli
Bai, Lihua
author_sort He, Wanlin
collection PubMed
description Controlling laser-induced periodic surface structures on semiconductor materials is of significant importance for micro/nanophotonics. We here demonstrate a new approach to form the unusual structures on 4H-SiC crystal surface under irradiation of three collinear temporally delayed femtosecond laser beams (800 nm wavelength, 50 fs duration, 1 kHz repetition), with orthogonal linear polarizations. Different types of surface structures, two-dimensional arrays of square islands (670 nm periodicity) and one-dimensional ripple structures (678 nm periodicity) are found to uniformly distribute over the laser-exposed areas, both of which are remarkably featured by the low spatial frequency. By altering the time delay among three laser beams, we can flexibly control the transition between the two surface structures. The experimental results are well explained by a physical model of the thermally correlated actions among three laser-material interaction processes. This investigation provides a simple, flexible, and controllable processing approach for the large-scale assembly of complex functional nanostructures on bulk semiconductor materials.
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spelling pubmed-89125472022-03-11 Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations He, Wanlin Zhao, Bo Yang, Jianjun Wen, Junqing Wu, Hua Guo, Shaoli Bai, Lihua Nanomaterials (Basel) Article Controlling laser-induced periodic surface structures on semiconductor materials is of significant importance for micro/nanophotonics. We here demonstrate a new approach to form the unusual structures on 4H-SiC crystal surface under irradiation of three collinear temporally delayed femtosecond laser beams (800 nm wavelength, 50 fs duration, 1 kHz repetition), with orthogonal linear polarizations. Different types of surface structures, two-dimensional arrays of square islands (670 nm periodicity) and one-dimensional ripple structures (678 nm periodicity) are found to uniformly distribute over the laser-exposed areas, both of which are remarkably featured by the low spatial frequency. By altering the time delay among three laser beams, we can flexibly control the transition between the two surface structures. The experimental results are well explained by a physical model of the thermally correlated actions among three laser-material interaction processes. This investigation provides a simple, flexible, and controllable processing approach for the large-scale assembly of complex functional nanostructures on bulk semiconductor materials. MDPI 2022-02-26 /pmc/articles/PMC8912547/ /pubmed/35269288 http://dx.doi.org/10.3390/nano12050796 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
He, Wanlin
Zhao, Bo
Yang, Jianjun
Wen, Junqing
Wu, Hua
Guo, Shaoli
Bai, Lihua
Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
title Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
title_full Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
title_fullStr Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
title_full_unstemmed Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
title_short Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations
title_sort manipulation of subwavelength periodic structures formation on 4h-sic surface with three temporally delayed femtosecond laser irradiations
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8912547/
https://www.ncbi.nlm.nih.gov/pubmed/35269288
http://dx.doi.org/10.3390/nano12050796
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