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Small object detection method with shallow feature fusion network for chip surface defect detection
The development of intelligent manufacturing often focuses on production flexibility, customization and quality control, which are crucial for chip manufacturing. Specifically, defect detection and classification are important for manufacturing processes in the semiconductor and electronics industri...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8913807/ https://www.ncbi.nlm.nih.gov/pubmed/35273204 http://dx.doi.org/10.1038/s41598-022-07654-x |