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A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference

Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bu...

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Autores principales: Qi, Yonghong, Zhao, Minghui, Li, Bo, Ren, Ziming, Li, Bing, Wei, Xueyong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914618/
https://www.ncbi.nlm.nih.gov/pubmed/35271120
http://dx.doi.org/10.3390/s22051973
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author Qi, Yonghong
Zhao, Minghui
Li, Bo
Ren, Ziming
Li, Bing
Wei, Xueyong
author_facet Qi, Yonghong
Zhao, Minghui
Li, Bo
Ren, Ziming
Li, Bing
Wei, Xueyong
author_sort Qi, Yonghong
collection PubMed
description Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry–Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0–700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.
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spelling pubmed-89146182022-03-12 A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference Qi, Yonghong Zhao, Minghui Li, Bo Ren, Ziming Li, Bing Wei, Xueyong Sensors (Basel) Article Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry–Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0–700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS. MDPI 2022-03-03 /pmc/articles/PMC8914618/ /pubmed/35271120 http://dx.doi.org/10.3390/s22051973 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Qi, Yonghong
Zhao, Minghui
Li, Bo
Ren, Ziming
Li, Bing
Wei, Xueyong
A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
title A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
title_full A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
title_fullStr A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
title_full_unstemmed A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
title_short A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference
title_sort compact optical mems pressure sensor based on fabry–pérot interference
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8914618/
https://www.ncbi.nlm.nih.gov/pubmed/35271120
http://dx.doi.org/10.3390/s22051973
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