Microspheres give improved resolution in nondestructive examination of semiconductor devices

The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path...

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Autor principal: Woods, R. C.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
News & Views
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8927605/
https://www.ncbi.nlm.nih.gov/pubmed/35297398
http://dx.doi.org/10.1038/s41377-022-00747-2
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author Woods, R. C.
author_facet Woods, R. C.
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description The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly.
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spelling pubmed-89276052022-04-01 Microspheres give improved resolution in nondestructive examination of semiconductor devices Woods, R. C. Light Sci Appl News & Views The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path can improve the resolution significantly. Nature Publishing Group UK 2022-03-16 /pmc/articles/PMC8927605/ /pubmed/35297398 http://dx.doi.org/10.1038/s41377-022-00747-2 Text en © The Author(s) 2022 https://creativecommons.org/licenses/by/4.0/Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/ (https://creativecommons.org/licenses/by/4.0/) .
spellingShingle News & Views
Woods, R. C.
Microspheres give improved resolution in nondestructive examination of semiconductor devices
title Microspheres give improved resolution in nondestructive examination of semiconductor devices
title_full Microspheres give improved resolution in nondestructive examination of semiconductor devices
title_fullStr Microspheres give improved resolution in nondestructive examination of semiconductor devices
title_full_unstemmed Microspheres give improved resolution in nondestructive examination of semiconductor devices
title_short Microspheres give improved resolution in nondestructive examination of semiconductor devices
title_sort microspheres give improved resolution in nondestructive examination of semiconductor devices
topic News & Views
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8927605/
https://www.ncbi.nlm.nih.gov/pubmed/35297398
http://dx.doi.org/10.1038/s41377-022-00747-2
work_keys_str_mv AT woodsrc microspheresgiveimprovedresolutioninnondestructiveexaminationofsemiconductordevices

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