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Microspheres give improved resolution in nondestructive examination of semiconductor devices
The minimum spatial resolution of typical optical inspection systems used in the microelectronics industry is generally governed by the classical relations of Ernst Abbe. Kwon et al. show in a new Light: Science and Applications article that using an additional glass microsphere in the optical path...
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8927605/ https://www.ncbi.nlm.nih.gov/pubmed/35297398 http://dx.doi.org/10.1038/s41377-022-00747-2 |