Local pressure calibration method of inductively coupled plasma generator based on laser Thomson scattering measurement

Based on laser Thomson scattering (TS) measurements and finite element method (FEM) simulations of electron density in inductively coupled plasma (ICP), the simulated local pressure calibration curves of ICP generator are obtained by comparing the experimental and simulated electron density distribu...

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Detalles Bibliográficos
Autores principales: Sun, Jinhai, Liu, Yong-Qiang, Zheng, Yan, Shi, Jielin, Li, Yu, Zhao, Yarui, Zhang, Xutao, Cai, He, Zhu, Xianli, Sun, Xinxue, Chao, Zengming, Yin, Hongcheng, Ding, Hongbin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8933524/
https://www.ncbi.nlm.nih.gov/pubmed/35304546
http://dx.doi.org/10.1038/s41598-022-08679-y

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