Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process

[Image: see text] Trichlorosilane (TCS) is a crucial intermediate product in the polysilicon manufacturing process, and its purification consumes a significant amount of energy. The design and control of the TCS heat integration pressure-swing distillation (HIPSD) process was investigated using Aspe...

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Detalles Bibliográficos
Autores principales: Yin, Min, Hua, Chao, Lu, Ping, Zhang, Haohao, Bai, Fang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8945141/
https://www.ncbi.nlm.nih.gov/pubmed/35350368
http://dx.doi.org/10.1021/acsomega.1c05943

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8945141/
https://www.ncbi.nlm.nih.gov/pubmed/35350368
http://dx.doi.org/10.1021/acsomega.1c05943

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