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Design and Control of Pressure-Swing Heat Integration Distillation for the Trichlorosilane Purification Process
[Image: see text] Trichlorosilane (TCS) is a crucial intermediate product in the polysilicon manufacturing process, and its purification consumes a significant amount of energy. The design and control of the TCS heat integration pressure-swing distillation (HIPSD) process was investigated using Aspe...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8945141/ https://www.ncbi.nlm.nih.gov/pubmed/35350368 http://dx.doi.org/10.1021/acsomega.1c05943 |