The Optical and Thermo-Optical Properties of Non-Stoichiometric Silicon Nitride Layers Obtained by the PECVD Method with Varying Levels of Nitrogen Content

In this paper, we investigated the optical and thermo-optical properties of a-SiN(x):H layers obtained using the PECVD technique. SiN(x):H layers with different refractive indices were obtained from silane and ammonia as precursor gases. Surface morphology and chemical composition studies were inves...

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Detalles Bibliográficos
Autores principales: Kluska, Stanisława, Jurzecka-Szymacha, Maria, Nosidlak, Natalia, Dulian, Piotr, Jaglarz, Janusz
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8948622/
https://www.ncbi.nlm.nih.gov/pubmed/35329711
http://dx.doi.org/10.3390/ma15062260

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8948622/
https://www.ncbi.nlm.nih.gov/pubmed/35329711
http://dx.doi.org/10.3390/ma15062260

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