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The Optical and Thermo-Optical Properties of Non-Stoichiometric Silicon Nitride Layers Obtained by the PECVD Method with Varying Levels of Nitrogen Content
In this paper, we investigated the optical and thermo-optical properties of a-SiN(x):H layers obtained using the PECVD technique. SiN(x):H layers with different refractive indices were obtained from silane and ammonia as precursor gases. Surface morphology and chemical composition studies were inves...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8948622/ https://www.ncbi.nlm.nih.gov/pubmed/35329711 http://dx.doi.org/10.3390/ma15062260 |