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Broadband Zero-Power Wakeup MEMS Device for Energy-Efficient Sensor Nodes
A zero-power wakeup scheme for energy-efficient sensor applications is presented in this study based on a piezoelectric MEMS energy harvester featuring wafer-level-integrated micromagnets. The proposed setup overcomes a hybrid assembly of magnets on a chip-level, a major drawback of similar existing...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8949483/ https://www.ncbi.nlm.nih.gov/pubmed/35334699 http://dx.doi.org/10.3390/mi13030407 |