Development and Characterization of ZnO Piezoelectric Thin Film Sensors on GH4169 Superalloy Steel Substrate by Magnetron Sputtering

At present, piezoelectric sensors are primarily applied in health monitoring areas. They may fall off owing to the adhesive’s durability, and even damage the monitored equipment. In this paper, a piezoelectric film sensor (PFS) based on a positive piezoelectric effect (PPE) is presented and a ZnO fi...

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Detalles Bibliográficos
Autores principales: Mo, Guowei, Cui, Yunxian, Yin, Junwei, Gao, Pengfei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950897/
https://www.ncbi.nlm.nih.gov/pubmed/35334685
http://dx.doi.org/10.3390/mi13030390

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC8950897/
https://www.ncbi.nlm.nih.gov/pubmed/35334685
http://dx.doi.org/10.3390/mi13030390

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